Air bearings are a crucial component in ultra-precise motion control systems, offering frictionless operation by suspending components on a thin film of air. This eliminates mechanical contact, reducing wear and vibration while achieving unparalleled accuracy and smooth motion. They are essential in industries like semiconductor manufacturing, metrology, and photonics, where even minute inaccuracies can lead to significant issues.
ALIO's air bearing stages, such as their planar XY, linear X, and rotational air bearing systems, are designed to deliver exceptional precision and repeatability, down to nanometre-level accuracy. These systems are built to handle demanding applications, offering high payload capacities, smooth motion over long travel distances, and high-speed capabilities without compromising precision.
Bill Hennessey, President of ALIO Industries says, “One of ALIO's standout offerings is the Planar XY Air Bearing Stage, which achieves sub-micron accuracy and bi-directional repeatability of +/- 100nm. This stage is ideal for applications requiring ultra-precise positioning, such as semiconductor inspection and metrology. The use of a granite base ensures minimal thermal expansion and maximum stability, essential for maintaining high precision over extended periods and varying environmental conditions.”
ALIO’s Nano Z stages use dual voice coil motors and air bearings to overcome limitations in vertical motion, providing exceptional stability and accuracy in the Z-axis. This design is particularly beneficial in applications like wafer inspection and photonics, where vertical precision is critical.
ALIO’s commitment to innovation and quality is further demonstrated by its custom solutions, which cater to specific industry needs, ensuring that each motion control system is optimized for its intended application. The company’s air bearing stages are not only renowned for their precision but also for their robustness and reliability, making them a preferred choice for high-precision industries worldwide.
By leveraging advanced materials, innovative design, and rigorous testing methods, ALIO continues to set the standard in nano-precision motion control. ALIO’s air bearing systems are a testament to its leadership in the field, providing unmatched performance and reliability that meet the exacting demands of cutting-edge technology sectors.
