A quantum leap in Piezo Nanopositioning
Aerotech's QNP Series piezo nanopositioning stages offer nanometer-level performance in a compact, high-stiffness package for X, XY and Z axis applications. A variety of travel and feedback options make them ideal for applications from microscopy to optics alignment. The design offers best-in-class stiffness and resonant frequency, and unparalleled geometric performance.
Aerotech's QNP-series piezo nanopositioning stages give nanometer-level performance in a compact, high-stiffness package. A variety of travel and feedback options make these stages ideal for applications ranging from microscopy to optics alignment.
High Quality in a Compact Package
The QNP piezo stages are guided by precision flexures optimized using finite element analysis to ensure high-stiffness and long life. This design offers best-in-class stiffness and resonant frequency for high process throughput and fast closed-loop response. The design also provides unparalleled geometric performance (straightness and angular errors) while minimizing overall stage package size.
High-Resolution and Positioning Accuracy
All QNP piezo stages offer closed-loop feedback using a unique capacitive sensor design that yields sub-nanometer positioning resolution and high-positioning accuracy (linearity). The capacitive sensors directly measure the output of the positioning carriage, enabling superior linearity and positioning repeatability when compared to indirect feedback metrology techniques such as strain-gage feedback. Closed-loop travel options are 100, 250 and 500 µm.
Ultra-Precision Control
When coupled with Aerotech's Q-series controllers and drives, QNP piezo nanopositioning stages demonstrate sub-nanometer positioning resolution and in-position stability (jitter), and high-positioning bandwidth. Aerotech's Dynamic Controls Toolbox and Motion Designer software packages provide a host of advanced yet easy-to-use tools such as Learning Control, Harmonic Cancellation and Command Shaping, providing improved tracking errors and faster step-and-settle times.
Automatic parameter and calibration identification is accomplished with Aerotech's FlashConfig feature. The stage is automatically identified and all operational parameters including axis calibration data are uploaded into the controller ensuring safe, accurate and true "plug-and-play" operation.
Design Flexibility
Aerotech's QNP piezo stages are available with capacitive sensor feedback or without feedback (open-loop). An optional mounting plate provides direct mounting to English or metric breadboard optical tables. Common travels of the X, XY and Z stages mount together without adapter plates. All QNP piezo stages are available in vacuum-prepared versions upon request.
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