With resolution to 0.15nm, linearity to 0.007%, and repeatability to 1nm, nanometer-level precision is assured. With high dynamics (resonant frequency and stiffness) of up to 1050Hz, users can achieve higher throughput in exacting processes. A variety of travels (100µm to 600µm), feedback options, and vacuum versions means this stage series is versatile.
When coupled with Aerotech's Q-series controllers and drives, QNP piezo stages demonstrate sub-nanometer positioning resolution and in-position stability (jitter), and high-positioning bandwidth. Software options such as Aerotech's Dynamic Controls Toolbox and Motion Designer packages provide advanced tools such as Learning Control, Harmonic Cancellation, and Command Shaping, providing improved tracking errors and faster step-and-settle times.